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基于直接生长碳纳米管场发射阴极的微焦点X 射线源技术研究

Study on a microfocus X-ray source with a directly-grown CNT field emission cathode

  • 摘要: 随着医疗诊断和工业检测等领域对高精度成像需求的不断提升, 开发微型化、 长寿命的微焦点X 射线源成为当前研究的重要课题。 本研究通过化学气相沉积方法在镍合金基底上成功制备了具有优异场发射性能的碳纳米管阴极, 其开启电场低至1.01 V/μm, 且展现出良好的工作稳定性。 进一步基于电磁场仿真方法, 设计开发了以该电子源为核心的单聚焦电子枪结构, 通过优化关键电极参数, 最终实现了空间分辨率达12 lp/mm(42.1 μm)的高质量成像效果。 实验测试结果与仿真模拟数据具有良好的一致性。

     

    Abstract: With the increasing demand for high-precision imaging in medical diagnostics and industrial inspection, developing miniaturized, long-life microfocus X-ray sources has become an important research topic. In this work, we successfully fabricated carbon nanotube (CNT) cathodes on nickel alloy substrates via chemical vapor deposition, achieving exceptional field emission performance with a low turn-on field of 1.01 V/μm and good operational stability. Furthermore, a single-focus electron gun structure was designed and developed based on electromagnetic field simulations. Parameter optimization of key electrodes enabled high-quality imaging with a spatial resolution of 12 lp/mm (42.1 μm), showing good agreement between experimental results and simulation data.

     

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